# Langdao Silex Debuts 15W EUV Light Source

October 16, 2026 at 03:44 PM

> Langdao Silex unveiled its FlintNano LPP-OXXO EUV prototype in Shanghai, featuring 90% domestic components and 15W of output power.

**Langdao Silex** debuted its **FlintNano LPP-OXXO** extreme ultraviolet (EUV) light source prototype at the 26th **China International Industry Fair** in Shanghai. The system features a 1,000W driving laser and delivers over 15W of output power using laser-produced plasma.

The prototype achieves a conversion efficiency over 2% and brightness of 100 W/(mm²·sr). Founded in 2024 by **Tsinghua University** alumni, Langdao Silex claims 90% of components are domestically sourced. The system maintains 5% power stability over 100 hours.

While **ASML** deployed 250W sources in 2018, this 15W prototype exceeds early 11W commercial benchmarks. Langdao is now developing the FlintMicro-LPP high-power source, which has finished proof-of-principle validation to further China's domestic EUV roadmap.


#EUV [#Semiconductors](<https://hardwarebrief.com/hashtag/semiconductors>) #LangdaoSilex [#TechInnovation](<https://hardwarebrief.com/hashtag/techinnovation>) #Shanghai

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