Langdao Silex debuted its FlintNano LPP-OXXO extreme ultraviolet (EUV) light source prototype at the 26th China International Industry Fair in Shanghai. The system features a 1,000W driving laser and delivers over 15W of output power using laser-produced plasma.
The prototype achieves a conversion efficiency over 2% and brightness of 100 W/(mm²·sr). Founded in 2024 by alumni, Langdao Silex claims 90% of components are domestically sourced. The system maintains 5% power stability over 100 hours.
While deployed 250W sources in 2018, this 15W prototype exceeds early 11W commercial benchmarks. Langdao is now developing the FlintMicro-LPP high-power source, which has finished proof-of-principle validation to further China's domestic EUV roadmap.