China Acquires Hundreds of ASML Lithography Units

A new report reveals China's heavy reliance on Western DUV scanners and Huawei's use of Tau-Scaling to bypass advanced tool shortages.

A late September 2026 analysis by the Centre for Technology & Statecraft reveals China has acquired hundreds of ASML systems recently. While no EUV units were sold, ASML confirmed China accounted for 49 percent of system revenue in the first half of 2024.

The report estimates China received up to 90 DUV scanners annually, though its revenue share dropped to 33 percent by 2025. These systems rely on lasers from Cymer, a U.S. firm ASML bought 14 years ago, highlighting a deep reliance on Western technology.

China's domestic lithography remains in early development, with a projected 14-year gap between prototypes and production. To compensate for the lack of new machinery, Huawei is reportedly utilizing a specialized technique known as Tau-Scaling for chips.


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